Michael L. Simpson - Knoxville TN Douglas H. Lowndes - Knoxville TN Vladimir I. Merkulov - Knoxville TN Michael A. Guillorn - Knoxville TN Charles L. Britton - Alcoa TN
Assignee:
UT-Battelle, LLC - Oak Ridge TN
International Classification:
H01J 902
US Classification:
445 24, 313309, 313311
Abstract:
Systems and methods are described for a single self-aligned carbon nanofiber emitters within a dielectric well. A method, includes: providing a substrate; defining lithographically a catalyst particle, the catalyst particle coupled to the substrate; depositing a dielectric layer, the dielectric layer coupled to the substrate; depositing an extractor layer, the extractor layer coupled to the dielectric layer; forming an extractor aperture in the extractor layer; forming a dielectric well in the dielectric layer to uncover the catalyst particle; and then fabricating at a location of the catalyst particle and within the dielectric well a single self-aligned carbon containing tip i) having a base located substantially at the bottom of the dielectric well and ii) extending substantially away from the substrate using plasma enhanced chemical vapor deposition.
Catalyst-Induced Growth Of Carbon Nanotubes On Tips Of Cantilevers And Nanowires
James Weifu Lee - Oak Ridge TN Douglas H. Lowndes - Knoxville TN Vladimir I. Merkulov - Knoxville TN Gyula Eres - Knoxville TN Yayi Wei - Fishkill NY Elias Greenbaum - Oak Ridge TN Ida Lee - Oak Ridge TN
A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scaning probe microscopy (AFM, EFM etc). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) Proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate, (2) Catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips, (3) Control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions, and (4) Automation for mass production.
Gated Fabrication Of Nanostructure Field Emission Cathode Material Within A Device
Michael L. Simpson - Knoxville TN, US Vladimir I. Merkulov - Knoxville TN, US Anatoli V. Melechko - Knoxville TN, US Douglas H. Lowndes - Knoxville TN, US
Assignee:
UT-Battelle, LLC - Oak Ridge TN
International Classification:
H01L021/00
US Classification:
438 20, 445 24, 445 50
Abstract:
Gated field emission devices and systems and methods for their fabrication are described. A method includes growing a substantially vertically aligned carbon nanostructure, the substantially vertically aligned carbon nanostructure coupled to a substrate; covering at least a portion of the substantially vertically aligned carbon nanostructure with a dielectric; forming a gate, the gate coupled to the dielectric; and releasing the substantially vertically aligned carbon nanostructure by forming an aperture in the gate and removing a portion of the dielectric.
Controlled Non-Normal Alignment Of Catalytically Grown Nanostructures In A Large-Scale Synthesis Process
Vladimir I. Merkulov - Knoxville TN, US Anatoil V. Melechko - Knoxville TN, US Michael A. Guillorn - Knoxville TN, US Douglas H. Lowndes - Knoxville TN, US Michael L. Simpson - Knoxville TN, US
Assignee:
UT-Battelle LLC - Oak Ridge TN
International Classification:
H01J001/62
US Classification:
313311, 313309, 313310, 977 1
Abstract:
Systems and methods are described for controlled non-normal alignment of catalyticaly grown nanostructures in a large-scale synthesis process. A method includes: generating an electric field proximate an edge of a protruding section of an electrode, the electric field defining a vector; and forming an elongated nanostructure located at a position on a surface of a substrate, the position on the surface of the substrate proximate the edge of the protruding section of the electrode, at least one tangent to the elongated nanostructure i) substantially parallel to the vector defined by the electric field and ii) substantially non-parallel to a normal defined by the surface of the substrate.
Individually Electrically Addressable Vertically Aligned Carbon Nanofibers On Insulating Substrates
Michael A. Guillorn - Knoxville TN, US Timothy Eric McKnight - Greenback TN, US Vladimir I. Merkulov - Knoxville TN, US Anatoli Vasilievich Melechko - Knoxville TN, US Michael Leon Simpson - Knoxville TN, US
Assignee:
UT-Battelle LLC - Oak Ridge TN
International Classification:
H01J 1/05 H01J 1/14 H01J 19/06
US Classification:
313311, 313309, 313336, 313351
Abstract:
Systems and methods are described for individually electrically addressable carbon nanofibers on insulating substrates. An apparatus includes an electrically conductive interconnect formed on at least a part of an insulating surface on a substrate; and at least one vertically aligned carbon nanofiber coupled to the electrically conductive interconnect. A kit includes a substrate having an insulating surface; an electrically conductive interconnect formed on at least a part of the insulating surface; and at least one vertically aligned carbon nanofiber coupled to the electrically conductive interconnect.
Carbon Containing Tips With Cylindrically Symmetrical Carbon Containing Expanded Bases
Vladimir I. Merkulov - Knoxville TN, US Douglas H. Lowndes - Knoxville TN, US Michael A. Guillorn - Knoxville TN, US Michael L. Simpson - Knoxville TN, US
Systems and methods are described for carbon containing tips with cylindrically symmetrical carbon containing expanded bases. A method includes producing an expanded based carbon containing tip including: fabricating a carbon containing expanded base on a substrate; and then fabricating a carbon containing fiber on the expanded base. An apparatus includes a carbon containing expanded base coupled to a substrate; and a carbon containing extension coupled to said carbon containing expanded base. The carbon containing expanded base is substantially cylindrically symmetrical and said carbon containing extension is substantially cylindrically symmetrical.
Individually Electrically Addressable Carbon Nanofibers On Insulating Substrates
Michael A. Guillorn - Knoxville TN, US Timothy Eric McKnight - Greenback TN, US Vladimir I. Merkulov - Knoxville TN, US Anatoli Vasilievich Melechko - Knoxville TN, US Michael Leon Simpson - Knoxville TN, US
Systems and methods are described for individually electrically addressable carbon nanofibers on insulating substrates. A method includes forming an electrically conductive interconnect on at least a part of an insulating surface on a substrate; and growing at least one fiber that is coupled to the electrically conductive interconnect.
Michael A. Guillorn - Knoxville TN, US Bojan Ilic - Ithaca NY, US Anatoli V. Melechko - Oak Ridge TN, US Vladimir I. Merkulov - Knoxville TN, US Douglas H. Lowndes - Knoxville TN, US Michael L. Simpson - Knoxville TN, US
Assignee:
UT-Battelle, LLC - Oak Ridge TN
International Classification:
G12B 21/02 G01N 13/16 G01B 5/28 G01B 7/34
US Classification:
250306, 250307, 73105
Abstract:
Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.