Vitaly G Kasperovich
age ~52
from Beaverton, OR
- Also known as:
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- Natalia Kasperovich
- Vit Kasperovich
- Phone and address:
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13780 Martingale Ct, Beaverton, OR 97008
503-521-9050
Vitaly Kasperovich Phones & Addresses
- 13780 Martingale Ct, Beaverton, OR 97008 • 503-521-9050
- 3027 Overlook Dr, Hillsboro, OR 97124 • 503-531-1837 • 503-629-9159
- Valley Village, CA
- 3658 Ventura Canyon Ave, Sherman Oaks, CA 91423
- Buena Park, CA
- Los Angeles, CA
- Torrance, CA
Work
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Position:Professional/Technical
Education
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Degree:Graduate or professional degree
Us Patents
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Deposition Apparatus For Providing Uniform Low-K Dielectric
view source -
US Patent:20050284371, Dec 29, 2005
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Filed:Jun 29, 2004
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Appl. No.:10/881095
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Inventors:Robert McFadden - Beaverton OR, US
Shurong Liang - Hillsboro OR, US
Vitaly Kasperovich - Hillsboro OR, US
Mandyam Sriram - Beaverton OR, US -
International Classification:C23C016/00
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US Classification:118715000, 427248100
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Abstract:Improvements in a PECVD chamber to provide better uniformity in film thickness and mechanical strength are described. Less contact surface is provided to the outer edge of the wafer and non-uniform gas distribution occurs through adjustments to the gas distribution plate to provide this uniformity.
Resumes
Vitaly Kasperovich
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