Vijay Sakhare

US Patent:

20090062959, Mar 5, 2009

Filed:

Aug 25, 2008

Appl. No.:

12/198076

Inventors:

Vijay Sakhare - Santa Clara CA, US
Sekar Krishnasamy - Santa Clara CA, US
Mordechai Leska - Santa Clara CA, US
Donald Foldenauer - San Jose CA, US
Rinat Shimshi - San Jose CA, US
Marvin L. Freeman - Round Rock TX, US
Jeffery Hudgens - San Francisco CA, US

International Classification:

G05B 19/04
H01L 21/67
G12B 13/00

US Classification:

700254, 41422202

Abstract:

Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.

US Patent:

20090062960, Mar 5, 2009

Filed:

Aug 25, 2008

Appl. No.:

12/198079

Inventors:

Sekar Krishnasamy - Santa Clara CA, US
Vijay Sakhare - Santa Clara CA, US
Mordechai Leska - Santa Clara CA, US
Donald Foldenauer - San Jose CA, US
Rinat Shimshi - San Jose CA, US

International Classification:

B25J 13/00
B25J 21/00

US Classification:

700258, 901 47

Abstract:

Described herein is a method and system for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes manually calibrating a center of a robot blade aligned with respect to a target. The method further includes recording a first positional value of the center of the robot blade aligned with respect to a camera. The method further includes automatically determining a second positional value of the center of the robot blade aligned with respect to the camera. The method further includes automatically recalibrating the robot blade based on an offset between the second positional value and the first positional value exceeding a tolerance offset from the first positional value.