Stephen K Tsu

US Patent:

20080014134, Jan 17, 2008

Filed:

Aug 14, 2007

Appl. No.:

11/838521

Inventors:

Sebastien Raoux - Santa Clara CA, US
Kuo-Chen Lin - Taipei City, TW
Robbert Vermeulen - Pleasant Hill CA, US
Daniel Clark - Pleasanton CA, US
Stephen Tsu - Los Gatos CA, US
Mehran Moalem - Cupertino CA, US
Allen Fox - Sunnyvale CA, US
Monique McIntosh - San Jose CA, US
Joshua Putz - Fairfield CA, US
Eric Rieske - Livermore CA, US
Poh Lee - Singapore, SG

International Classification:

C07C 1/00
C01B 7/20

US Classification:

423241000, 585641000, 585733000

Abstract:

In some aspects, a method is provided for abating perfluorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.

US Patent:

20080003150, Jan 3, 2008

Filed:

Feb 9, 2007

Appl. No.:

11/673548

Inventors:

Sebastien Raoux - Santa Clara CA, US
Kuo-Chen Lin - Taipei City, TW
Robbert Vermeulen - Pleasant Hill CA, US
Daniel Clark - Pleasanton CA, US
Stephen Tsu - Los Gatos CA, US
Mehran Moalem - Cupertino CA, US
Allen Fox - Sunnyvale CA, US
Monique McIntosh - San Jose CA, US
Joshua Putz - Fairfield CA, US
Eric Rieske - Livermore CA, US
Poh Lee - Singapore, SG

International Classification:

B01D 53/00
G05B 11/00

US Classification:

422105000, 422173000

Abstract:

In certain aspects, a system is provided for abating perfluorocarbons (PFCs) from a gaseous waste stream that includes (1) a wet scrubber adapted to scrub a gaseous waste stream and having an outlet adapted to discharge a scrubbed gaseous waste stream; and (2) a controlled decomposition oxidation (CDO) system. The CDO system includes a CDO thermal reaction chamber that includes (a) an inlet coupled to the outlet of the wet scrubber; (b) a catalyst bed adapted to abate PFCs within the CDO thermal reaction chamber; and (c) an outlet. Numerous other aspects are provided.

US Patent:

20080003151, Jan 3, 2008

Filed:

Feb 9, 2007

Appl. No.:

11/673549

Inventors:

Sebastien Raoux - Santa Clara CA, US
Kuo-Chen Lin - Taipei City, TW
Robbert Vermeulen - Pleasant Hill CA, US
Daniel Clark - Pleasanton CA, US
Stephen Tsu - Los Gatos CA, US
Mehran Moalem - Cupertino CA, US
Allen Fox - Sunnyvale CA, US
Monique McIntosh - San Jose CA, US
Joshua Putz - Fairfield CA, US
Eric Rieske - Livermore CA, US
Poh Lee - Singapore, SG

International Classification:

B01D 53/86

US Classification:

422173000, 422168000

Abstract:

In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material; and (2) thermally-conductive fixtures positioned within the cartridge. Numerous other aspects are provided.

US Patent:

20080003157, Jan 3, 2008

Filed:

Feb 9, 2007

Appl. No.:

11/673404

Inventors:

Sebastien Raoux - Santa Clara CA, US
Kuo-Chen Lin - Taipei City, TW
Robbert Vermeulen - Pleasant Hill CA, US
Daniel Clark - Pleasanton CA, US
Stephen Tsu - Los Gatos CA, US
Mehran Moalem - Cupertino CA, US
Allen Fox - Sunnyvale CA, US
Monique McIntosh - San Jose CA, US
Joshua Putz - Fairfield CA, US
Eric Rieske - Livermore CA, US
Poh Lee - Singapore, SG

International Classification:

B01D 53/74
C01B 21/00
C01B 7/20
C07C 1/00

US Classification:

423239100, 422173000, 423241000, 585641000, 585702000

Abstract:

In at least one aspect, a controlled decomposition oxidation (CDO) system is provided for abating perfluorocarbons (PFCs) that includes (1) an upstream portion including a first conduit adapted to convey a gaseous waste stream; (2) a thermal reaction chamber having an inlet coupled to the first conduit, a catalyst bed adapted to abate PFCs, and an outlet; and (3) a downstream portion including a second conduit having a first end coupled to the outlet of the thermal reaction chamber and having a portion, downstream from the first end, positioned proximate to the first conduit. The second conduit is adapted to convey a gaseous waste stream heated within the thermal reaction chamber to enable a transfer of heat energy from the second conduit to the first conduit so as to pre-heat the gaseous waste stream in the first conduit. Numerous other aspects are provided.

US Patent:

20080003158, Jan 3, 2008

Filed:

Feb 9, 2007

Appl. No.:

11/673542

Inventors:

Sebastien Raoux - Santa Clara CA, US
Kuo-Chen Lin - Taipei City, TW
Robbert Vermeulen - Pleasant Hill CA, US
Daniel Clark - Pleasanton CA, US
Stephen Tsu - Los Gatos CA, US
Mehran Moalem - Cupertino CA, US
Allen Fox - Sunnyvale CA, US
Monique McIntosh - San Jose CA, US
Joshua Putz - Fairfield CA, US
Eric Rieske - Livermore CA, US
Poh Lee - Singapore, SG

International Classification:

C01B 7/20
C01B 17/00
C07C 1/00
C01B 21/00

US Classification:

423239100, 423241000, 585641000, 585702000

Abstract:

In some aspects, a method is provided for abating perfluorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.