Stephen J. Botos - Pittsburgh PA Albert P. Ciez - Murrysville PA Brian L. Favero - New Kensington PA
Assignee:
Aerotech, Inc. - Pittsburgh PA
International Classification:
G01B 730
US Classification:
33 1N, 33 1 M, 33706
Abstract:
A low profile tilt stage comprises a planar base, a cradle defining a cylindrical surface having a cylindrical axis parallel to the base, a table mounted on the cradle by curvilinear bearings, a curvilinear direct drive brushless motor between the cradle and table, and an encoder reader fixed relative to the base and an encoder scale fixed to the table.
Stephen J. Botos - Pittsburgh PA Albert P. Ciez - Murrysville PA Gerald W. McClain - Pittsburgh PA
Assignee:
Aerotech, Inc. - Pittsburgh PA
International Classification:
H01L 2168
US Classification:
310 12, 361144, 359393, 108138, 35568, 7447901
Abstract:
A small footprint vertical lift and rotary positioning stage comprises a bottom wedge and a top wedge, a linear bearing between the bottom wedge and the top wedge, cam grooves and cam surfaces for constraining the motion of the top wedge in a vertical direction, a brushless linear motor for moving the bottom wedge back and forth along a horizontal path raising and lowering the top wedge, a circular table rotatably mounted on the top wedge and having a first cylindrical flange extending downward from a segment of the circumference of the circular table, a bracket mounted on the side of the top wedge, the bracket supporting an upwardly extending second cylindrical flange coaxial with the circular table and the first cylindrical flange, and a brushless curvilinear motor between the first and second cylindrical flanges.
Small Footprint Direct Drive Mechanical Positioning Stage
Stephen J. Botos - Pittsburgh PA Brian L. Favero - New Kensington PA
Assignee:
Aerotech, Inc. - Pittsburgh PA
International Classification:
B25B 2714
US Classification:
292815, 269 73, 359392, 359393
Abstract:
A small footprint mechanical positioning stage capable of operating in two perpendicular orientations comprises a base plate, a carriage plate, linear bearings, a brushless linear motor, and a linear encoder. The linear bearings, the linear motor, and the encoder scale are all parallel to the direction of travel of the positioning stage.
A direct drive vertical lift and rotation stage comprises an annular z-axis housing having a central opening, a z-axis rotor assembly journaled within the central opening of the z-axis housing, a motor between the z-axis housing and the z-axis rotor, an annular theta-axis housing having a central opening, a theta-axis rotor assembly journaled within the central opening of the theta-axis housing, and a motor between the theta-axis housing and the theta-axis rotor.
Stephen J. Botos - Pittsburgh PA, US Brian P. O'Connor - Allison Park PA, US
Assignee:
Aerotech, Inc. - Pittsburgh PA
International Classification:
B23K 26/10
US Classification:
310 12, 355 72, 355 53
Abstract:
A high precision laser machining apparatus having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages, a carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. Mounted on the same base plate is a laser optics support stage and a workpiece advance mechanism.
Stephen J. Botos - Pittsburgh PA, US Brian P. O'Connor - Allison Park PA, US
Assignee:
Aerotech, inc. - Pittsburgh PA
International Classification:
B23Q 17/00
US Classification:
310 12, 74826, 29759
Abstract:
A dual-function, three-axis positioning system having a high precision z-theta state with a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis and a second horizontal translation axis (x-axis) comprises parallel spaced apart linear translation states, a first carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. A removable or permanently fixed second carriage is mounted on or being part of the first carriage.
Stephen J. Botos - Pittsburgh PA, US Brian P. O'Connor - Allison Park PA, US
Assignee:
Aerotech, Inc. - Pittsburgh PA
International Classification:
B23K 26/00
US Classification:
310 12, 21912167
Abstract:
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages, a carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity.
Stephen J. Botos - Pittsburgh PA, US Brian P. O'Connor - Allison Park PA, US
Assignee:
Aerotech, Inc. - Pittsburgh PA
International Classification:
B23K 26/00
US Classification:
310 12, 21912167
Abstract:
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages, a carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity.