Ronald H Bouley

US Patent:

7000465, Feb 21, 2006

Filed:

Sep 17, 2004

Appl. No.:

10/943377

Inventors:

Michael L'Bassi - Sterling MA, US
Mark J. Quaratiello - Atkinson NH, US
Ronald H. Bouley - Windham NH, US

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

G01F 1/68

US Classification:

7320427

Abstract:

A system for and method of compensating for attitude sensitivity of at least two thermal sensor coils mounted on a tube through which a fluid flows along a common axis of flow for use in generating a flow measurement signal representative of the flow of fluid through the tube is disclosed. One of the coils is adapted in provide thermal energy to the fluid flowing through the tube at an upstream location so as to establish and measure the upstream temperature of the fluid at the upstream location, and one of the coils is adapted to measure the downstream temperature of the fluid at a downstream location. The flow measurement signal is a function of the difference between the measured upstream and downstream temperatures. The system includes structure for, and the method includes the steps of measuring the force of gravity in the direction of the common axis; and modifying the flow measurement signal as a function of the measured force of gravity.