Wendell Thomas BLONIGAN - Pleasanton CA, US Michael Allen Renta - Campbell CA, US
International Classification:
C23F 1/08 C23C 16/455 B23P 11/00
US Classification:
15634534, 118715, 2952502
Abstract:
Vacuum processing chambers having provisions for thermal expansion and contraction. Specific embodiments provide a plasma processing chamber having a showerhead that enables thermal expansion and contraction without imparting structural stress on the chamber body and without breaking any vacuum seal.