- Santa Clara CA, US Man Gu - Malta NY, US Baofu Zhu - Clifton Park NY, US
International Classification:
H01L 29/78 H01L 29/08 H01L 21/8238
Abstract:
Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A gate structure extends over a semiconductor body, a first source/drain region includes an epitaxial semiconductor layer on a first portion of the semiconductor body, and a second source/drain region is positioned in a second portion of the semiconductor body. The gate structure includes a first sidewall and a second sidewall opposite the first sidewall, the first source/drain region is positioned adjacent to the first sidewall of the gate structure, and the second source/drain region is positioned adjacent to the second sidewall of the gate structure. The first source/drain region has a first width, and the second source/drain region has a second width that is greater than the first width.
Methods Of Forming Source/Drain Regions Of A Finfet Device And The Resulting Structures
One illustrative method disclosed herein includes forming at least one fin, forming a first recessed layer of insulating material adjacent the at least one fin and forming epi semiconductor material on the at least one fin. In this example, the method also includes forming a second recessed layer of insulating material above the first recessed layer of insulating material, wherein at least a portion of the epi semiconductor material is positioned above a level of the upper surface of the second recessed layer of insulating material, and forming a source/drain contact structure above the second recessed layer of insulating material, wherein the source/drain contact structure is conductively coupled to the epi semiconductor material.
Epitaxial Structures Of A Semiconductor Device Having A Wide Gate Pitch
- GRAND CAYMAN, KY DANIEL JAEGER - Saratoga Springs NY, US MAN GU - Malta NY, US BRADLEY MORGENFELD - Greenfield Center NY, US HAITING WANG - Clifton Park NY, US KAVYA SREE DUGGIMPUDI - Clifton Park NY, US WANG ZHENG - Ballston Lake NY, US
International Classification:
H01L 29/78 H01L 29/66 H01L 21/822
Abstract:
A semiconductor device is provided, which includes an array of active regions, gate stacks and substantially uniform epitaxial structures. The gate stacks of the array include a first gate stack and a second gate stack over an active region. An active pillar between the first gate stack and the second gate stack, and the active pillar separating two substantially uniform epitaxial structures. A contact structure over the active pillar, positioned equidistant from the first gate stack and the second gate stack.
Field-Effect Transistors With Diffusion Blocking Spacer Sections
- Grand Cayman, KY Hong Yu - Clifton Park NY, US Man Gu - Malta NY, US Jianwei Peng - Clifton Park NY, US Michael Aquilino - Gansevoort NY, US
International Classification:
H01L 29/66 H01L 29/78
Abstract:
Structures for a field-effect transistor and methods of forming a field-effect transistor. A gate structure of the field-effect transistor is arranged over an active region comprised of a semiconductor material. A first sidewall spacer is arranged adjacent to the gate structure. A second sidewall spacer includes a section arranged between the first sidewall spacer and the active region. The first sidewall spacer is composed of a low-k dielectric material.
Globalfoundries 2016 - 2018
Principal Engineer Integration and Yield
Ibm 2015 - 2016
Semiconductor Process Integration Engineering Professional
University of Virginia 2009 - 2014
Graduate Student
Education:
University of Virginia 2009 - 2014
Doctorates, Doctor of Philosophy, Physics, Philosophy
University of Science and Technology of China 2005 - 2009
Bachelors, Bachelor of Science, Materials Science, Engineering
Skills:
Afm Materials Science Thin Films Semiconductors Characterization Nanotechnology Physics Photolithography Matlab Tem Data Analysis Simulations Latex Etching Pvd C++ Research Spectroscopy X Ray Diffraction Analysis Polishing Condensed Matter Physics Ni Labview Originlab Crystallography