Kevin M Violette

US Patent:

7021119, Apr 4, 2006

Filed:

Oct 14, 2003

Appl. No.:

10/683271

Inventors:

Kevin J. Violette - Woodbury CT, US

Assignee:

ASML Holding N.V. - Veldhoven

International Classification:

G01B 13/08

US Classification:

73 375, 73105

Abstract:

An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant liquid flow and sensing a liquid mass flow rate within a bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a liquid mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.

US Patent:

7472579, Jan 6, 2009

Filed:

Feb 24, 2006

Appl. No.:

11/360514

Inventors:

Kevin J. Violette - Woodbury CT, US

Assignee:

ASML Holding N.V. - Veldhoven

International Classification:

G01B 13/08
G01B 13/22

US Classification:

73 375, 73105

Abstract:

An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant liquid flow and sensing a liquid mass flow rate within a bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a liquid mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.

US Patent:

7508514, Mar 24, 2009

Filed:

Jun 23, 2006

Appl. No.:

11/473114

Inventors:

Kevin J. Violette - Woodbury CT, US

Assignee:

ASML Holding N.V. - Veldhoven

International Classification:

G01B 11/00

US Classification:

356400, 356399, 35613904, 3561522, 3561523

Abstract:

A laser beam may be used to provide a virtual reference axis of travel for the in-axis direction of motion of lenses in a zoom assembly to be positioned during a zoom operation. The virtual reference axis is projected along the optical axis, parallel to existing mechanical lens slides. The virtual reference axis passes through an aperture on each of the lens assemblies, and is sampled by a set of optics and detectors on each of the lens assemblies. The optics and detectors are arranged such that any change in the position of a lens cell within a lens assembly relative to the virtual reference axis is sensed and corrected using a feedback signal to a positioning motor. Since the same virtual reference axis is used for each lens in the zoom assembly, each lens can be independently corrected for off-axis position errors to very high precision.