John L Vossen

US Patent:

39820661, Sep 21, 1976

Filed:

Jul 25, 1975

Appl. No.:

5/599128

Inventors:

Frederick Russell Nyman - Carmel IN
John Louis Vossen - Bridgewater NJ
Dennis Glendon Fisher - Titusville NJ
George Frederick Nichols - Oaklandon IN

Assignee:

RCA Corporation - New York NY

International Classification:

B32B 1508

US Classification:

178 66R

Abstract:

An improved metal coating for a video disc of a grooved polymer disc, a conductive metal coating thereon and a dielectric coating on said metal coating comprising a trilayer film of a first layer of copper about 25-50 angstroms thick, a second layer about 200 angstroms thick of an alloy of nickel, and chromium and, optionally, iron, containing from about 20 to about 30 atomic percent of oxygen, and a third layer, of copper, about 25-50 angstroms thick.

US Patent:

56835582, Nov 4, 1997

Filed:

Jan 23, 1996

Appl. No.:

8/589920

Inventors:

Peter A. Sieck - Santa Rosa CA
Russell J. Hill - El Cerrito CA
John L. Vossen - Bridgewater NJ
Stephen C. Schulz - Benicia CA

Assignee:

The Boc Group, Inc. - Murray Hill NJ

International Classification:

C23C 1434

US Classification:

20419212

Abstract:

An elongated anode structure having multiple points to which electrons are attracted is provided. The anode can be constructed of multiple wire brushes that are attached to a metal rod. Use of the anode in magnetron systems significantly reduces dielectric material build-up and improves film uniformity in both dc reactive and non-reactive sputtering. Moreover, the anode reduces overheating and increases the operation time of magnetron systems undergoing reactive sputtering of dielectric materials. In one embodiment, the magnetron system has a cylindrical cathode and a pair of elongated anodes positioned parallel to and equidistance from the cathode. The anode structure is particularly suited for sputtering uniform films of dielectric materials, including silicon dioxide and silicon nitride.

US Patent:

41014022, Jul 18, 1978

Filed:

Apr 23, 1976

Appl. No.:

5/679842

Inventors:

John Louis Vossen - Bridgewater NJ
Frederick Russell Nyman - Carmel IN
George Frederick Nichols - Oaklandon IN

Assignee:

RCA Corporation - New York NY

International Classification:

C23C 1500
C23C 1302

US Classification:

204192C

Abstract:

The addition of copper, either as a thin film or as an alloy constituent, to nickel-chromium alloys improves the adhesion of such alloys to polymeric substrates and coatings.

US Patent:

44507879, May 29, 1984

Filed:

May 29, 1984

Appl. No.:

6/386686

Inventors:

Herbert A. Weakliem - Pennington NJ
John L. Vossen - Bridgewater NJ

Assignee:

RCA Corporation - New York NY

International Classification:

C23C 1308

US Classification:

118723

Abstract:

A glow discharge plasma reactor for deposition of thin films from a reactive RF glow discharge is provided with a screen positioned between the walls of the chamber and the cathode to confine the glow discharge region to within the region defined by the screen and the cathode. A substrate for receiving deposition material from a reactive gas is positioned outside the screened region. The screen is electrically connected to the system ground to thereby serve as the anode of the system. The energy of the reactive gas species is reduced as they diffuse through the screen to the substrate. Reactive gas is conducted directly into the glow discharge region through a centrally positioned distribution head to reduce contamination effects otherwise caused by secondary reaction products and impurities deposited on the reactor walls.

US Patent:

39849074, Oct 12, 1976

Filed:

Jul 25, 1975

Appl. No.:

5/599130

Inventors:

John Louis Vossen - Bridgewater NJ
Frederick Russell Nyman - Carmel IN
George Frederick Nichols - Oaklandon IN

Assignee:

RCA Corporation - New York NY

International Classification:

B32B 1508
B32B 1520

US Classification:

29195

Abstract:

The addition of copper, either as a thin film or as an alloy constituent, to nickel-chromium alloys improves the adhesion of such alloys to polymeric substrates and coatings.

US Patent:

40564576, Nov 1, 1977

Filed:

Sep 20, 1976

Appl. No.:

5/724550

Inventors:

John Louis Vossen - Bridgewater NJ

Assignee:

RCA Corporation - New York NY

International Classification:

C23C 1500
B32B 900

US Classification:

204192SP

Abstract:

By radio frequency sputtering hafnium films on an alumina or sapphire substrate at high deposition rates and minimum substrate target bias, improved adhesion of the hafnium films to the substrate is obtained.

US Patent:

40040801, Jan 18, 1977

Filed:

Jul 25, 1975

Appl. No.:

5/599129

Inventors:

John L. Vossen - Bridgewater NJ
Frederick Russell Nyman - Carmel IN
Dennis Glendon Fisher - Titusville NJ
George Frederick Nichols - Oaklandon IN

Assignee:

RCA Corporation - New York NY

International Classification:

H04N 128
B32B 302

US Classification:

358128

Abstract:

An improved metal coating for a video disc of a grooved polymer disc, a conductive metal coating thereon and a dielectric coating on said metal coating, wherein said metal coating comprises a film of a pseudoalloy composition of an alloy of nickel and chromium and, optionally, iron, containing from about 10 to about 25 atomic percent of oxygen admixed with from about 10 to 15 atomic percent of copper.

US Patent:

43701965, Jan 25, 1983

Filed:

Mar 25, 1982

Appl. No.:

6/362043

Inventors:

John L. Vossen - Bridgewater NJ
Bernard Halon - Brooklyn NY

Assignee:

RCA Corporation - New York NY

International Classification:

C23F 102

US Classification:

156643

Abstract:

A method of anisotropic etching of aluminum or an alloy thereof comprising using as the etch gas a mixture of boron trichloride, trichloromethane and hydrogen. The etchant mixture advantageously also contains nitrogen and helium.