Macdermid Enthone
Retired
Enthone
Research Director
Entegris Jun 1, 2006 - Dec 1, 2011
Product Manager
Education:
University of New Haven
Master of Business Administration, Masters
Southern Connecticut State University
Master of Science, Masters, Chemistry
University of Connecticut
Bachelors, Bachelor of Science, Chemistry
Skills:
Six Sigma Semiconductors Cross Functional Team Leadership Polymers R&D Design of Experiments Chemistry
Us Patents
Defect Reduction In Electrodeposited Copper For Semiconductor Applications
John Commander - Old Saybrook CT, US Richard Hurtubise - Clinton CT, US Vincent Paneccasio - Madison CT, US Xuan Lin - New Haven CT, US Kshama Jirage - Branford CT, US
Assignee:
Enthone Inc. - West Haven CT
International Classification:
C25D 5/02 C25D 3/38
US Classification:
205123, 205118, 205296
Abstract:
A method for electroplating a copper deposit onto a semiconductor integrated circuit device substrate having submicron-sized features, and a concentrate for forming a corresponding electroplating bath. A substrate is immersed into an electroplating bath formed from the concentrate including ionic copper and an effective amount of a defect reducing agent, and electroplating the copper deposit from the bath onto the substrate to fill the submicron-sized reliefs. The occurrence of protrusion defects from superfilling, surface roughness, and voiding due to uneven growth are reduced, and macro-scale planarity across the wafer is improved.
Defect Reduction In Electrodeposited Copper For Semiconductor Applications
John Commander - Old Saybrook CT, US Richard Hurtubise - Clinton CT, US Vincent Paneccasio - Madison CT, US Xuan Lin - Northford CT, US Kshama Jirage - Branford CT, US
Assignee:
ENTHONE INC. - West Haven CT
International Classification:
C25D 7/12
US Classification:
205157
Abstract:
A method for electroplating a copper deposit onto a semiconductor integrated circuit device substrate having submicron-sized features, and a concentrate for forming a corresponding electroplating bath. A substrate is immersed into an electroplating bath formed from the concentrate including ionic copper and an effective amount of a defect reducing agent, and electroplating the copper deposit from the bath onto the substrate to fill the submicron-sized reliefs. The occurrence of protrusion defects from superfilling, surface roughness, and voiding due to uneven growth are reduced, and macro-scale planarity across the wafer is improved.
Plating Process For Electroless Nickel On Zinc Die Castings
Mark W. Zitko - Meriden CT John H. Commander - Old Saybrook CT Victor J. Waldman - Milford CT
Assignee:
Enthone-Omi, Inc. - West Haven CT
International Classification:
C25D 500
US Classification:
205191
Abstract:
A process is provided for plating zinc die cast substrates with an electroless nickel coating comprising depositing an electrolytic zinc layer on the substrate followed by depositing a first electroless nickel layer on the electrolytic zinc layer using a first alkaline electroless nickel bath and then depositing a finish electroless nickel layer on the first electroless nickel layer using an acidic electroless nickel bath. In a preferred embodiment, a second electroless nickel layer is deposited on the first electroless nickel layer using a second alkaline electroless nickel bath. It is preferred that at least one and preferably all of the electroless nickel baths contain an effective amount of antimony ions to enhance bath stability and metal to metal adhesion. Mechanical cleaning of the zinc die casting before plating is preferred.
Alkaline Zinc And Zinc Alloy Electroplating Baths And Processes
John H. Commander - Old Saybrook CT Victor J. Waldman - Milford CT
Assignee:
Enthone-OMI Inc. - West Haven CT
International Classification:
C25D 322 C25D 356
US Classification:
205245
Abstract:
An aqueous bath for electrodepositing zinc and zinc alloys wherein the alloying metals are selected from the group consisting of iron, cobalt and nickel and containing an effective additive amount of a quaternary ammonium polymer to produce enhanced deposits. A process for electrodepositing zinc and zinc alloys using the baths of the invention is also disclosed.
John H. Commander - Old Saybrook CT Vincent Paneccasio - Madison CT
Assignee:
Enthone-OMI, Inc. - West Haven CT
International Classification:
C25D 330
US Classification:
204 541
Abstract:
A vinyl-pyridine or vinyl-quinoline quaternary derivative is provided to enhance the brightness and operating properties of tin aqueous sulfuric acid plating baths.
Copper Deposition In Wafer Level Packaging Of Integrated Circuits
- Waterbury CT, US Kyle Whitten - Hamden CT, US Vincent Paneccasio, JR. - Madison CT, US John Commander - Old Saybrook CT, US Richard Hurtubise - Clinton CT, US
An electrodeposition composition comprising: (a) a source of copper ions; (b) an acid; (c) a suppressor; and (d) a leveler, wherein the leveler comprises a quaternized dipyridyl compound prepared by reacting a dipyridyl compound with a difunctional alkylating agent or a quaternized poly(epihalohydrin). The electrodeposition composition can be used in a process for forming a copper feature over a semiconductor substrate in wafer level packaging to electrodeposit a copper bump or pillar on an underbump structure of a semiconductor assembly.
- Waterbury CT, US Kyle Whitten - Hamden CT, US Richard Hurtubise - Clinton CT, US John Commander - Old Saybrook CT, US Eric Rouya - Oakland CA, US
International Classification:
C25D 3/38 C25D 7/12 C25D 17/00
Abstract:
An electrolytic plating composition for superfilling submicron features in a semiconductor integrated circuit device and a method of using the same. The composition comprises (a) a source of copper ions to electrolytically deposit copper onto the substrate and into the electrical interconnect features, and (b) a suppressor comprising at least three amine sites, said polyether comprising a block copolymer substituent comprising propylene oxide (PO) repeat units and ethylene oxide (EO) repeat units, wherein the number average molecular weight of the suppressor compound is between about 1,000 and about 20,000.
Copper Deposition In Wafer Level Packaging Of Integrated Circuits
- Waterbury CT, US Kyle Whitten - Hamden CT, US Vincent Paneccasio, Jr. - Madison CT, US John Commander - Old Saybrook CT, US Richard Hurtubise - Clinton CT, US
An electrodeposition composition comprising: (a) a source of copper ions; (b) an acid; (c) a suppressor, and (d) a leveler, wherein the leveler comprises a quaternized dipyridyl compound prepared by reacting a dipyridyl compound with a difunctional alkylating agent or a quaternized poly(epihalohydrin). The electrodeposition composition can be used in a process for forming a copper feature over a semiconductor substrate in wafer level packaging to electrodeposit a copper bump or pillar on an underbump structure of a semiconductor assembly.