Guenter B Sifnatsch

US Patent:

7146237, Dec 5, 2006

Filed:

Apr 7, 2004

Appl. No.:

10/819903

Inventors:

Uzi Lev-Ami - Mountain View CA, US
Guenter Sifnatsch - Santa Clara CA, US
Mark Attwood - Morgan Hill CA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G06F 19/00

US Classification:

700121

Abstract:

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

US Patent:

7219255, May 15, 2007

Filed:

Sep 23, 2004

Appl. No.:

10/948085

Inventors:

Nidal Khalil - San Jose CA, US
Guenter Sifnatsch - Santa Clara CA, US
Uzi Lev-Ami - Mountain View CA, US
Ron Hadar - Cupertino CA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G06F 11/00

US Classification:

714 4, 714 11

Abstract:

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

US Patent:

7693687, Apr 6, 2010

Filed:

Dec 4, 2006

Appl. No.:

11/566632

Inventors:

Uzi Lev-Ami - Mountain View CA, US
Guenter Sifnatsch - Santa Clara CA, US
Mark Attwood - Morgan Hill CA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G06F 17/18

US Classification:

702186

Abstract:

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

US Patent:

7787477, Aug 31, 2010

Filed:

Jul 11, 2005

Appl. No.:

11/178626

Inventors:

Guenter Sifnatsch - Santa Clara CA, US
Matthew Richter - Woodside CA, US
Maxym Makhota - Santa Clara CA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

H04L 12/28

US Classification:

370401, 370389, 370230, 370235, 713153

Abstract:

An address-transparent device is disclosed that couples two networks in a semiconductor fab and communicates packets between a host on a first network and a tool on a second network. Optionally, the address-transparent device intercepts packets for local use by a data consumer that resides within or outside of the address-transparent device. The address-transparent device can intercept all or a portion of data streams. As another option, the address-transparent device reroutes packet to another destination by changing the header of the received packet.

US Patent:

20050010318, Jan 13, 2005

Filed:

Jul 11, 2003

Appl. No.:

10/617355

Inventors:

Uzi Lev-Ami - Mountain View CA, US
Guenter Sifnatsch - Santa Clara CA, US
Mark Attwood - Morgan Hill CA, US

International Classification:

G06F019/00

US Classification:

700109000

Abstract:

A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.