Gertrude Fleming Rempfer

US Patent:

40963861, Jun 20, 1978

Filed:

Apr 4, 1977

Appl. No.:

5/784037

Inventors:

Gertrude F. Rempfer - Forest Grove OR
George H. Lesch - Eugene OR
Osbie Hayes Griffith - Eugene OR

Assignee:

Taylor-Kincaid Company - Eugene OR

International Classification:

G01M 2300

US Classification:

250365

Abstract:

An improved electrostatic electron lens for photoelectron emission microscopes is disclosed, having a planar upper surface on its beam entrance electrode highly polished to a mirror finish for light reflection. The lens is positioned between a light source and a specimen holder such that light may be reflected off the planar upper surface of the entrance electrode onto the specimen for causing photoemission of electrons from such specimen. The lens is constructed to enable expansion of the lens electrodes during heating, such as "bake-out" to remove adsorbed gases, without breaking the insulators between such electrodes. An intermediate electrode is disposed in a spaced, insulated relationship between the beam entrance electrode and an exit electrode by two insulator members. This intermediate electrode is provided with an outer annular shoulder portion circumferentially disposed about its outer periphery cooperating in an abutting and overlapping relationship with an inner annular shoulder projection circumferentially disposed about one insulator, allowing the intermediate electrode to expand radially outward during heating without fracturing the insulators.