Geoffrey R Scheller

US Patent:

50026313, Mar 26, 1991

Filed:

Mar 9, 1990

Appl. No.:

7/494999

Inventors:

Konstantinos P. Giapis - Maplewood NJ
Richard A. Gottscho - Maplewood NJ
Geoffrey R. Scheller - Allentown PA

Assignee:

AT&T Bell Laboratories - Murray Hill NJ

International Classification:

H01L 21306
B44C 122
C03C 1500
C03C 2506

US Classification:

156643

Abstract:

Reactive ion plasma etching apparatus and method are based upon the discovery of enhanced uniformity of etching at low workpiece temperatures. With cooling to sufficiently low temperatures, spontaneous etching is inhibited and etching uniformity is controlled not by gas flow and pressure but rather by ion flux. As a result, one can eliminate uniformity enhancing apparatus which heretofore obstructed optical access to the workpiece, provide window means permitting optical access to a major portion of the workpiece and employ sophisticated optical monitoring techniques during the etching process.

US Patent:

52177920, Jun 8, 1993

Filed:

Oct 17, 1991

Appl. No.:

7/779430

Inventors:

Christopher E. D. Chidsey - North Plainfield NJ
Howard E. Katz - Summit NJ
Thomas M. Putvinski - Scotch Plains NJ
Geoffrey R. Scheller - Allentown PA
Marcia L. Schilling - Basking Ridge NJ
William L. Wilson - Somerville NJ

Assignee:

AT&T Bell Laboratories - Murray Hill NJ

International Classification:

B32B 300

US Classification:

428207

Abstract:

This invention embodies an optical medium which consists of polar, multi-monomolecular layers of organic dye molecules with a net polar orientation, considerable second order optical nonlinearity, and excellent thermal stability. The medium is prepared by repeated sequential depositions on a surface of multivalent metal ions, e. g. Zr. sup. 4+, and organic dyes terminated with an acidic functionality, e. g. a phosphonic acid, followed by activation of the surface for the next deposition sequence. The monolayers are deposited in the form of a multilayer film containing up to 1000 or more monolayers. The monolayers are deposited from liquid solutions; therefore they may be deposited on substrates having diverse topography and configurations. Second harmonic generation (SHG) analysis establishes that the multilayers have uniform polar order which does not decrease with increasing numbers of monolayers in the film. As determined by SHG, the inorganic interlayers impart orientational stability to the dye molecules up to 150. degree. C.

US Patent:

53266269, Jul 5, 1994

Filed:

Dec 17, 1992

Appl. No.:

7/992515

Inventors:

Christopher E. D. Chidsey - North Plainfield NJ
Howard E. Katz - Summit NJ
Thomas M. Putvinski - Scotch Plains NJ
Geoffrey R. Scheller - Allentown PA
Marcia L. Schilling - Basking Ridge NJ
William L. Wilson - Somerville NJ

Assignee:

AT&T Bell Laboratories - Murray Hill NJ

International Classification:

B05D 310

US Classification:

427301

Abstract:

This invention embodies an optical medium which consists of polar, multi-monomolecular layers of organic dye molecules with a net polar orientation, considerable second order optical nonlinearity, and excellent thermal stability. The medium is prepared by repeated sequential depositions on a surface of multivalent metal ions, e. g. Zr. sup. 4+, and organic dyes terminated with an acidic functionality, e. g. a phosphonic acid, followed by activation of the surface for the next deposition sequence. The monolayers are deposited in the form of a multilayer film containing up to 1000 or more monolayers. The monolayers are deposited from liquid solutions; therefore they may be deposited on substrates having diverse topography and configurations. Second harmonic generation (SHG) analysis establishes that the multilayers have uniform polar order which does not decrease with increasing numbers of monolayers in the film. As determined by SHG, the inorganic interlayers impart orientational stability to the dye molecules up to 150. degree. C.