Doug Aitken is an American multimedia artist. Doug Aitken was born in Redondo Beach, California in 1968. In 1987, he initially studied magazine illustration with ...
Allen J. Bartlett - Milford MA Douglas F. Aitken - Bedford NH
Assignee:
Helix Technology Corporation - Mansfield MA
International Classification:
B01D 800
US Classification:
62 555
Abstract:
A cryopump is capable of pumping a process chamber at a process pressure and differentially pumping a second chamber such as an RGA independently at a substantially lower pressure. A member extends through the cryopump housing into a low pressure region disposed within the second stage array. The member comprises a port for accessing the low pressure region, thus providing an independent differential pumping source. No physical seal is required between the member and the main cryopump volume to maintain the pressure differential.
Philip A. Lessard - Boxboro MA Douglas F. Aitken - Bedford NH Robert D. Bradford - Mansfield MA Roland P. Graham - Wakefield MA Steven A. Michaud - Hayerhill MA Karen J. Manning - East Bridgewater MA
Assignee:
Helix Technology Corporation - Mansfield MA
International Classification:
B01D 800
US Classification:
62 555
Abstract:
A cold trap includes a set of baffles cooled by the cold finger of a closed cycle refrigerator. The baffles are vertically disposed in a vertical fluid conduit with frustoconical and conical surfaces for directing liquid to a circular trough during regeneration. After the liquid is collected, it is blown from the trough through a pressure relief valve by a nitrogen purge. The trough is formed in the upper surface of a connecting flange at the lower end of the fluid conduit.