Abstract:
The pellicle mounting fixture for affixing a pellicle to a mask, including a first support and a second support member and with the first member for receiving a pellicle and with the second member for supporting a mask, a guide structure connected to the first member and the second member for providing rotational movement between the first and second members between an upstanding position for one of the members relative to the other member and a spaced parallel position between the first and second members and for providing lateral movement between the first and second members between the spaced parallel position and a touching parallel position between the first and second members, and resilient structure connected to one of the members and projecting outwardly to engage the other member during lateral movement between the first and second members.