Joseph M. Blum - Yorktown Heights NY Bruce Bumble - Pasadena CA Kevin K. Chan - Staten Island NY Joao R. Conde - Lisbon, PT Jerome J. Cuomo - Lincolndale NY William F. Kane - Florida NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
C23C 1650
US Classification:
427 39
Abstract:
A high-efficiency, low-temperature, plasma-enhanced chemical vapor deposition (PECVD) system for growing or depositing various types of thin films on substrate surfaces, or etching such surfaces, using substrates of materials such as silicon, plastic, etc. The system uses a hollow-cathode-effect electron source with a surrounding confining electrode to create a plasma at the substrate surface to insure that the density of reactive species is both enhanced and localized at the substrate surface thus causing the rate of growth of the films, or the etch rate, to increase so that the process can take place at much lower temperatures and power levels. A particular embodiment involves the growing of hydrogenated amorphous silicon (a:Si:H), at room temperature, on silicon using a tubular reactor containing a cylindrical electrode lining the inside of the reactor walls acting as a counter electrode for an rf-powered, substrate-supporting electrode near the center of the reactor. A set of silicon wafers, on which the amorphous silicon is grown, is mounted on the latter electrode. The reaction gases (silane) flowing between the electrodes are decomposed in a plasma excited by an rf power source (13.
Youtube
Bruce Dow - Becoming Mr. Bumble (2006)
Bruce Dow transforms into Mr. Bumble for the Stratford Festival's 2006...
Category:
Entertainment
Uploaded:
13 May, 2007
Duration:
2m 43s
One man's Green Hornet.mpg
What started out as an attempt to learn flight of the bumble bee on th...
Category:
Entertainment
Uploaded:
27 Sep, 2010
Duration:
3m 4s
SHINDIG #51 (1965) - [7of7] - The Searchers, ...
SHINDIG! #51, aired September 8, 1965 -- part 7of7 ----------------......
Category:
Music
Uploaded:
25 Feb, 2010
Duration:
7m 10s
I'm Bringing Home a Baby Bumble Bee - If You'...
Every week I lead a folk song sing-a-long for up to 60 preschool child...
Category:
Entertainment
Uploaded:
25 May, 2011
Duration:
3m 47s
Oliver Twist Clip: Mr. Bumble & Mrs. Mann pla...
Category:
Entertainment
Uploaded:
30 Mar, 2010
Duration:
2m 29s
FLIGHT OF THE BUMBLE BEE - VANESSA MAE
El vuelo del abejoro, o el vuelo del moscardon , gracias amigas , zoe,...
Category:
Travel & Events
Uploaded:
28 Apr, 2009
Duration:
4m 29s
Beardyman - Aphex Twin Attacked by Bumble Bees
Aphex Twin Attacked by Bumble Bees - Edinburgh Festival 2009 suggestio...
Category:
Comedy
Uploaded:
29 Jan, 2010
Duration:
2m 14s
Stitcho :: Nezzy :: Lil-H :: Ty-One :: Loyz :...
Vido de quelque danseur Normand : Stitcho Nezzy Lil-H Ty-One Loyz Pio ...