A circuit that includes an isolation boundary formed to a depth in a substrate defining an active area of the substrate, a primary junction formed in the active area to a primary junction depth in the substrate to collect electron/hole pairs, and a secondary junction formed in the active area adjacent to the isolation boundary to a secondary junction depth at least equal to the isolation boundary depth.
Kevin M. Connolly - Chandler AZ Jung S. Kang - Chandler AZ Berni W. Landau - Beaverton OR James E. Breisch - Chandler AZ Akira Kakizawa - Phoenix AZ
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 21329
US Classification:
438 57, 438 73
Abstract:
Leakage current may be reduced in trench isolated semiconductor devices by providing a buffer between the trench isolation and an active area For example, with a trench isolated photodiode, a buffer of opposite conductivity type may be provided between the trench and the diffusion that forms the p-n junction of the photodiode.
Kevin M. Connolly - Chandler AZ Jung S. Kang - Chandler AZ Berni W. Landau - Beaverton OR James E. Breisch - Chandler AZ Akira Kakizawa - Phoenix AZ Mark A. Beiley - Chandler AZ Cory E. Weber - Beaverton OR Shaofeng Yu - Lake Oswego OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2100
US Classification:
438 48
Abstract:
Leakage current may be reduced in trench isolated semiconductor devices by providing a buffer between the trench isolation and an active area. For example, with a trench isolated photodiode, a buffer of opposite conductivity type may be provided between the trench and the diffusion that forms the p-n junction of the photodiode.
Embedded Dielectric Film For Quantum Efficiency Enhancement In A Cmos Imaging Device
Edward J. Bawolek - Chandler AZ Robert C. Sundahl - Phoenix AZ Berni W. Landau - Beaverton OR Stephen B. Gospe - Fremont CA Jack S. Uppal - San Jose CA Jung S. Kang - Chandler AZ
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2700
US Classification:
2502081
Abstract:
The present invention is an image sensor and its fabricating method. The image sensor comprises a photodiode and a dielectric structure. The photodiode is responsive to an amount of incident light from a light source. The dielectric structure is on top of the photodiode and is placed between the photodiode and an inter-level dielectric (ILD) oxide layer. The dielectric structure contains a dielectric material. The ILD oxide layer is made of an oxide material and has an ILD oxide thickness.
Kevin M. Connolly - Chandler AZ Jung S. Kang - Chandler AZ Berni W. Landau - Beaverton OR James E. Breisch - Chandler AZ Akira Kakizawa - Phoenix AZ
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 27146 H01L 3100
US Classification:
257431
Abstract:
Leakage current may be reduced in trench isolated semiconductor devices by providing a buffer between the trench isolation and an active area. For example, with a trench isolated photodiode, a buffer of opposite conductivity type may be provided between the trench and the diffusion that forms the p-n junction of the photodiode.
Kevin M. Connolly - Chandler AZ Jung S. Kang - Chandler AZ Berni W. Landau - Beaverton OR James E. Breisch - Chandler AZ Akira Kakizawa - Phoenix AZ Joseph W. Parks - Hillsboro OR Mark A. Beiley - Chandler AZ Cory E. Weber - Beaverton OR Shaofeng Yu - Lake Oswego OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 310232 H01L 3106 H01L 2100
US Classification:
257437
Abstract:
Leakage current may be reduced in trench isolated semiconductor devices by providing a buffer between the trench isolation and an active area. For example, with a trench isolated photodiode, a buffer of opposite conductivity type may be provided between the trench and the diffusion that forms the p-n junction of the photodiode.
Peter K. Moon - Portland OR Berni W. Landau - Beaverton OR David T. Krick - Hillsboro OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2176
US Classification:
438424
Abstract:
A method of forming a trench isolation region. The method of the present invention comprises the steps of forming an opening in a semiconductor substrate, oxidizing the opening a first time, and then etching the oxidized opening with a wet etchant comprising HF. The opening is then oxidized a second time.